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Panels for Halogen Laser Gases
Control systems for halogen laser gases.
Features
- Specialised systems for HCl and F2 based Excimer laser gases
- Panel mounted for safety and ease of installation
- Wide range of purge configurations and safety options available
-
Fully passivated for F2 service
Specification
- Materials of construction: Regulators-Nickel plated brass
- All other gas wetted components-316 stainless steel
- Max inlet pressure: 200 bar
- Outlet pressure: 0-5.3 bar
- Dimensions (w x h x d): 273 x 280 x 180mm (excluding hose and pipework)
Model
PM-Panel only
Standard supply
- PM-Panel only Stainless steel pigtail with cylinder connector
- Purge assemby
- Pressure regulator (HP1600N)
- Cylinder/delivery pressure gauges
- Outlet shut off valve
Options
- PSO-High pressure pneumatic shut off valve
- F10-Inlet filter 0.5 micron (HCL only)
- EFV-Excess flow valve
- supplimentary purge gas (He) outlet
- gas cabinet
How to order
ALWAYS specify gas or mixture to be used:
- Select cabinet if required eg CM - cabinet included
- Select number of process panels eg.1 or 2
- Select cylinder gauge eg. G-275.8 bar, L-68.9 bar,E-27.6 bar
- Select whether purge panel is required
- Select purge type eg.3 valve tee purge,4 valve cross purge,4 valve deep purge
- Select whether supplementary purge outlet
- Is custom configuration required for halogen service?
- Select any options eg.PSO,EFV,F10
Panels for use with F2 need to be fully passivated
